Tilt Series - 3D Reconstructions - Models

The following pages show demo tilt series recorded with the EM-MENU tomography package and 3D-reconstructions. Many thanks to all contributors. New contributions would be appreciated!
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Microsilica

 

In collaboration with TU München, Dept. of Technical Chemistry

 

Aligned and rotated tilt series for reconstruction

View movie...
   
Unaligned tilt series, recorded with EM-MENU 3.0 View movie...
   
Reconstructed volume View movie...

 

Contact hole

 

In collaboration with IHP, Frankfurt/Oder

Cross-section of a contact hole before filling with tungsten. Thickness ~300nm. Recorded in a CM-200 FEG (Mag. 20000x) with TemCam-F214 Click here to enlarge image...
   
Unaligned tilt series, recorded with EM-MENU 3.0 View movie...
   
Aligned and rotated tilt series for reconstruction View movie...
   
View through the reconstructed volume View movie...
   
Surface view of the diffusion barrier View movie...

 

MOS device

 

In collaboration with IHP, Frankfurt/Oder

MOS transistor Click here to enlarge image...
   
Chrystalline specimen causes Bragg contrast. Therefore exposures with different beam tilts are recorded and ... View movie...
   
... averaged ("discrete" hollow cone illumination). Click here to enlarge Image...
   
Tilt series, recorded with EM-MENU 3.0. For each tilt angle, 9 image recorded with different beam tilt are averaged (Tilt range: -50° - +52° (D = 3°), HT = 160 kV, Mag = 27.5k). View movie...
   
Reconstructed volume View movie...
   
Rendered volume, unfiltered View movie...
   
Rendered volume, filtered surface View movie...