Dark Field Orientation Map Tomography
As a recently developed non-destructive technique*, the DFOM is utilized for 3D grain-oriented mapping in polycrystalline specimens with a spatial resolution down to 1nm. Thereby, a series of conical-scanning dark field images are acquired as function of stage tilt automatically. Typical settings parameter are:
- Stage tilt range: ± 60 degree, 1 degree incr.
- Beam tilt range: 360 images per ring, 10 rings
- Up to 400.000 images taken in a few hours
For more details also see Universal Scan Generator (USG)
*H.H. Liu et al. – “Three-Dimensional Orientation Mapping in the TEM”, Science 332, 833-834 (2011)