For high-end scientific imaging in transmission electron microscopy, TVIPS was the first company to develop a new generation of CMOS based TEM cameras with active pixel sensors. Now available with a UHV-fitted flange, the model TemCam-XF416 (4k x 4k) and the budget friendly TemCam-F216 (2k x 2k) can be used as a superior replacement for micro-channel plates.

TemCam-F216 is TVIPS’s 4 megapixel camera, covering an image area of 32 × 32 mm². Having the same performance as the former F816 and F416 with smaller sensor area, this camera is an ideal solution for limited budgets. The field of view can be extended by automatic software tiling.

TemCam-XF416 is TVIPS’ best-selling camera. It overs a large field of view with 63.5 × 63.5 mm² and 16 megapixel. With its high sensitivity and frame rate, the XF416 is especially suited for low-energy electron microscopy.

Our UHV models XF416 UHV and F216 UHV are supplied with a CF-160 flange for XF416 UHV and CF-100 flange for F216 UHV as standard. The mechanical design shields all electronic components from the vacuum.

Fast Readout Fast Readout

The readout is done simultaneously on 2 channels with 10 MHz (TemCam-F216) or on 32 channels with 16 MHz (TemCam-XF416). The typical readout time of the 2k × 2k area of the F216 is 200 ms. The XF416 even achieves a readout time of 42 ms for the full 4k x 4k area.

Optimized Scintillator Optimized Scintillator

TVIPS optimizes the scintillator for individual demands. For high tension ranging from 40 kV – 60kV up to 400 kV, two standard types are available: optimized for high resolution or for high sensitivity. On customer request, individual scintillators can be manufactured.

LEEM image of a clean gold surface showing the Herringbone reconstruction. The LEED pattern (right upper corner), acquired at 66 eV, reveals the 22 x √3 R30° superlattice reflexes.

Kindly provided by: Prof. Meyer zu Heringdorf, University of Duisburg-Essen

Fiber-Optical Coupling Fiber-Optical Coupling

Fiber-optical coupling of the electron-sensitive layer (scintillator) with the sensor increases the amount of light collected in comparison to lens-optical coupling and, as a result, the sensitivity of the camera.

Sensor Cooling Sensor Cooling

For optimum performance, the Peltier-cooled CMOS sensor is located in a vacuum housing separated from the microscope vacuum. The scintillator surface is kept at room temperature. This design avoids contamination and allows the venting of the camera chamber without warming up the CMOS sensor.

UHV Flange UHV Flange

The TemCam-F216 UHV and the TemCam-XF416 UHV come with the standard CF-160 flange, making it straightforward to install and use the cameras in a UHV instrument.

* Typical Values
Sensor type CMOS
Format 2048 × 2048 4096 × 4096
Pixel size (µm2) 15.5 × 15.5 µm2
Fill factor 72%
Field of view 31.9 × 31.9 mm2 63.5 × 63.5 mm2
Readout rate (16 bit) 2 × 10 megapixel/sec 32 x 16 megapixel/sec
Frame rates: - 1.8 fps, full resolution,         1× binning 24 fps @ 4k x 4k
- 4.5 fps, full area, 2k × 2k, RS 95 fps @ 1k x 4k
- 8.5 fps, subarea, 2k × 1k, RS 190 fps @ 512 x 4k
Post magnification ~1.1× 1.4× – 1.8×
Electron-optical coupling 1:1 fiber optics
Scintillator type polycrystalline phosphor
Sensor cooling thermoelectric
Binning factors 1×, 2×, 4× 1×, 2×, 4×, 8×
Non-linearity < 1%
(after flatfield correction)
SNR (signal-to-noise-ratio) ~14:1 (120 kV)* 29:1 (200 kV)*
Resolution @ 200 kV ~14% ~20%
(NTF at Nyquist frequency)
Anti blooming blooming not present
Bottom mounted on-axis on-axis
System requirements Windows XP, 7, 10 Windows 10
Intel DualCore CPU Intel QuadCore CPU
Optical Gigabit Ethernet Optical 40 Gigabit Ethernet
PCI Express ×4 slot PCI Express ×16 slot